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Dark Field(暗場缺陷檢測)

涌淳半導(dǎo)體專注于半導(dǎo)體工藝設(shè)備的研發(fā)、制造、銷售及售后一體化服務(wù),提供半導(dǎo)體廠商工藝設(shè)備的一站式解決方案。

關(guān)鍵詞:

半導(dǎo)體設(shè)備、半導(dǎo)體工藝

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產(chǎn)品描述

Dark Field detectors collect scattered light over a large angular range, which provides high sensitivity for detection of small defects. Particles, scratches, missing patterns, as well as other surface contamination and pattern anomalies on the surface of the wafer scatter the incident laser light in various understood patterns.

產(chǎn)品詢價

涌淳半導(dǎo)體